We use 3D printed silicon nitride (SI ₃ N ₄) substrate technology to support a microoptical structure with line width accuracy of ± 1 Μ M and aperture of 20 Μ M, and can integrate TOF sensor and VCSEL array.
We use 3D printed silicon nitride (SI ₃ N ₄) substrate technology to support a microoptical structure with line width accuracy of ± 1 Μ M and aperture of 20 Μ M, and can integrate TOF sensor and VCSEL array.
